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US 11,114,319 B2Granted
Heat treatment apparatus and heat treatment method
AssigneeTokyo Electron Limited
InventorsTatsuya Yamaguchi, Yasuaki Kikuchi, Koji Yoshii, Wataru Nakajima, Norio Baba
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Abstract
A heat treatment apparatus includes a heating unit provided around a processing container accommodating a substrate; a plurality of blowing units configured to blow a cooling medium into a space between the processing container and the heating unit; and a shutter configured to simultaneously opens/closes at least two of the plurality of blowing units and including a slit formed corresponding to each of the blowing units.
Claims16
A heat treatment apparatus comprising:
- a processing container configured to accommodate a substrate;
- a heater provided around the processing container;
- a plurality of blowing paths configured to blow a cooling medium into a space between the processing container and the heater;
- and
- a shutter configured to simultaneously open/close at least two of the plurality of blowing units and including a slit formed corresponding to each of the blowing units.
2 more elements
A heat treatment method of a heat treatment apparatus including:
- a heater provided around a processing container accommodating a substrate;
- a plurality of blowing paths configured to blow a cooling medium into a space between the processing container and the heater;
- and a shutter configured to simultaneously open/close at least two of the plurality of blowing paths and including a slit formed corresponding to each of the blowing units, the heat treatment method comprising:
- switching to a small flow rate mode for controlling the heater based on a temperature in the processing container or the space in a state where the shutter is moved to a closed position and a large flow rate mode for controlling the heater based on the temperature in the processing container or the space in a state where the shutter is moved to an opened position, in response to a processing performed in the heat treatment apparatus.
1 more element
Dependencies are inferred from the claim text.