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US 10,833,007 B2Granted
Circular ring shape fuse device
AssigneeInternational Business Machines Corporation
InventorChih-Chao Yang
Life of this patent
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Abstract
An electrical fuse (e-fuse) is provided in which the contact area between the fuse element (i.e., fuse link) and the first and second electrodes is reduced. The reduction in contact area provides high electron density and enhanced programming efficiency to the electrical fuse. The fuse element of the present application, which is sandwiched between the first and second electrodes, has a circular ring shape. A dielectric material laterally surrounds the fuse element and is present in the center of the circular ring shaped fuse element.
Claims11
An electrical fuse comprising:
- a first electrode;
- a fuse element having a circular ring shape with a circular opening present therein, wherein the circular ring shape comprises an outer perimeter sidewall and an inner perimeter sidewall, wherein the fuse element is in direct physical contact with a topmost surface of the first electrode;
- a dielectric material laterally surrounding the inner perimeter sidewall and the outer perimeter sidewall of the fuse element, wherein the dielectric material laterally surrounding the inner perimeter sidewall is a solid dielectric material that entirely fills in the circular opening;
- and
- a second electrode located above, and in contact with, the fuse element.
2 more elements
Dependencies are inferred from the claim text.