US 10,770,323 B2 · Stackable substrate carriers

Abstract

In an embodiment, the present invention discloses a stackable substrate carrier for scalably storing, transporting or processing multiple substrates. The present substrate carriers can be stacked side-by-side by an attaching mechanism, forming an integrated carrier with double, triple or multiple capacity. The attaching mechanism comprises a locking mechanism to secure the substrate carriers together, engaged by mating two substrate carriers, together with an additional rotating or translating action of the two substrate carriers. Alternatively, the locking mechanism can be engaged by pressing two substrate carriers against each other, using friction to keep the carriers together. Other locking mechanism can also be used, such as hooks or latches.

Claims20

Dependent claims

A side-by-side stackable carrier for a plurality of substrates, wherein the side-by-side stackable carrier is configured for use in a semiconductor fabrication facility, the side-by-side stackable carrier comprising:

two side structures comprising slot marks for holding substrates;
two end structures securing to the side structures, at least one of the end structures comprising a bidirectional attaching mechanism including mating features configured to mate with an end structure of another side-by-side stackable carrier such that the bidirectional attaching mechanism engages sequentially in a first direction and in a subsequent second direction arranged at an angle relative to the first direction, wherein the sequential engagement in the second direction subsequent to the engagement in the first direction locks engagement between the mating features,
wherein the bidirectional attaching mechanisms of two mated end structures are configured to be mated by themselves without an additional component.

Dependencies are inferred from the claim text.

Stackable substrate carriers

Life of this patent

Stackable substrate carriers

Life of this patent

Abstract

Claims20