Imprint apparatus and article manufacturing method

An apparatus for curing a radical polymerizable material by irradiating the material with light in a state in which a mold is in contact with the material, comprising:

• an irradiator configured to irradiate the material with light for curing the material;
• and
• a controller configured to control the irradiator;
• and
• an interface configured to acquire a target value regarding a polymerization degree of the material,
• wherein the controller determines that whether or not the material is cured such that a degree of polymerization of the material falls within a predetermined range of the target value, and
• wherein the controller determines the irradiation time during which the material is irradiated with the light from the irradiator based on a square root of the illuminance of the light from the irradiator, with which the material is irradiated, and the target value in a case that the controller determines that the material is not cured such that the degree of the polymerization of the material falls within the predetermined range.

An apparatus for curing a material by irradiating the material with light in a state in which a mold is in contact with the material, photochemical reaction velocity of the material being proportional to a square root of an illuminance of the light with which the material is irradiated, the apparatus comprising:

• an irradiator configured to irradiate the material with light for curing the material;
• and
• a controller configured to control the irradiator,
• wherein the controller is configured to acquire information regarding that a piece of the material has not been cured to be within a predetermined range for a target polymerization degree after irradiation to the piece of the material with light by the irradiator has finished, and
• wherein the controller is configured to determine, after acquiring the information, an irradiation time during which another piece of the material is irradiated with light from the irradiator based on the square root of the illuminance of the light from the irradiator, and to control the irradiator to irradiate the other piece of the material with the light for the determined irradiation time.

An apparatus for curing a radical polymerizable material by irradiating the material with light in a state in which a mold is in contact with the material, comprising:

• an irradiator configured to irradiate the material with light for curing the material;
• and
• a controller configured to control the irradiator,
• wherein the controller is configured to acquire information regarding that a piece of the material has not been cured to be within a predetermined range for a target polymerization degree after irradiation to the piece of the material with light by the irradiator has finished, and
• wherein the controller is configured to determine, after acquiring the information, an irradiation time during which another piece of the material is irradiated with light from the irradiator based on a square root of an illuminance of the light from the irradiator, and to control the irradiator to irradiate the other piece of the material with the light for the determined irradiation time.

An apparatus for curing a material by irradiating the material with light in a state in which a mold is in contact with the material, photochemical reaction velocity of the material being proportional to a square root of an illuminance of the light with which the material is irradiated, the apparatus comprising:

• an irradiator configured to irradiate the material with light for curing the material;
• and
• a controller configured to control the irradiator,
• the irradiator including an adjustor configured to adjust an illuminance of the light with which the material is irradiated
• wherein the controller is configured to acquire information regarding that a piece of the material has not been cured to be within a predetermined range for a target polymerization degree after irradiation to the piece of the material with light by the irradiator has finished, and
• wherein the controller is configured to control, after acquiring the information, the adjuster to adjust an illuminance of the light from the irradiator when the irradiator irradiates another piece of the material with light based on a square of an irradiation time during which the other piece of the material is irradiated by the irradiator.

An apparatus for curing a radical polymerizable material by irradiating the material with light in a state in which a mold is brought into contact with the material, the apparatus comprising:

• an irradiator configured to irradiate the material with light;
• and
• a controller configured to control the irradiator,
• the irradiator including an adjustor configured to adjust an illuminance of the light with which the material is irradiated,
• wherein the controller is configured to acquire information regarding that a piece of the material has not been cured to be within a predetermined range for a target polymerization degree after irradiation to the piece of the material with light by the irradiator has finished, and
• wherein the controller is configured to control, after acquiring the information, the adjuster to adjust an illuminance of the light from the irradiator when the irradiator irradiates another piece of the material with light based on a square of an irradiation time during which the other piece of the material is irradiated by the irradiator.

A method of forming a pattern by curing a material by irradiating the material with light in a state in which a mold is in contact with the material, photochemical reaction velocity of the material being proportional to a square root of an illuminance of the light with which the material is irradiated, the method comprising:

• an irradiation step of irradiating a piece of the material with light for curing the piece of the material;
• an acquisition step of acquiring information regarding that the piece of the material has not been cured to be within a predetermined range for a target polymerization degree after the irradiation step has finished;
• a determination step of determining, after the acquisition step, an irradiation time during which another piece of the material is irradiated with light based on the square root of the illuminance of the light;
• and
• an irradiation step of irradiating the other piece of the material with the light for the determined irradiation time.

A method of forming a pattern by curing a radical polymerizable material by irradiating the material with light in a state in which a mold is brought into contact with the material, the method comprising:

• an irradiation step of irradiating a piece of the material with light for curing the piece of the material;
• an acquisition step of acquiring information regarding that the piece of the material has not been cured to be within a predetermined range for a target polymerization degree after the irradiation step has finished;
• a determination step of determining, after the acquisition step, an irradiation time during which another piece of the material is irradiated with light based on a square root of an illuminance of the light;
• and
• an irradiation step of irradiating the other piece of the material with the light for the determined irradiation time.

A method of forming a pattern by curing a material by irradiating the material with light in a state in which a mold is in contact with the material, photochemical reaction velocity of the material being proportional to a square root of an illuminance of the light with which the material is irradiated, the method comprising:

• an irradiation step of irradiating a piece of the material with light for curing the piece of the material;
• an acquisition step of acquiring information regarding that the piece of the material has not been cured to be within a predetermined range for a target polymerization degree after the irradiation step has finished;
• an adjustment step of adjusting an illuminance of the light for irradiating another piece of the material with light based on a square of an irradiation time during which the other piece of the material is irradiated;
• and
• an irradiation step of irradiating the other piece of the material with the illuminance adjusted in the adjustment step.

A method of curing a radical polymerizable material by irradiating the material with light in a state in which a mold is brought into contact with the material, the method:

• an irradiation step of irradiating a piece of the material with light for curing the piece of the material;
• an acquisition step of acquiring information regarding that the piece of the material has not been cured to be within a predetermined range for a target polymerization degree after the irradiation step has finished;
• an adjustment step of adjusting an illuminance of the light for irradiating another piece of the material with light based on a square of an irradiation time during which the other piece of the material is irradiated;
• and
• an irradiation step of irradiating the other piece of the material with the illuminance adjusted in the adjustment step.