Imprint method, imprint apparatus, program, and article manufacturing method

A method of manufacturing an article, the method comprising steps of:

• forming a pattern on a substrate using an imprint apparatus;
• and
• processing the substrate, on which the pattern has been formed, to manufacture the article,
• wherein the imprint apparatus molds an imprint material supplied onto the substrate with a mold to form the pattern on the substrate, and includes:
• a supply device configured to supply the imprint material onto the substrate;
• and
• a controller configured to control the supply device,
• wherein the controller is configured to:
• generate a supply arrangement pattern for each of a plurality of regions, which are obtained by dividing a region of the mold based on information of a pattern of the mold, by, for each region of the plurality of regions:
• obtaining first information corresponding to a first amount of imprint material required to form a first arrangement pattern of the imprint material in a region of the plurality of regions, the first amount of imprint material based on information of the pattern of the mold;
• obtaining second information corresponding to a second amount of imprint material required to form a second arrangement pattern of the imprint material in the region of the plurality of regions, the second amount of imprint material based on a thickness of a residual layer of the pattern to be formed on the substrate, wherein the second arrangement pattern of the imprint material is different from the first arrangement pattern of the imprint material;
• and
• generating third information corresponding to a total amount of imprint material required to form a supply arrangement pattern of the imprint material to be arranged in the region of the plurality of regions on the substrate, the total amount of imprint material being obtained by combining the first information of the first arrangement pattern of the imprint material and the second information of the second arrangement pattern of the imprint material, wherein the supply arrangement pattern is different from the first and second arrangement patterns;
• supply the imprint material on the substrate based on the respective supply arrangement patterns of all regions of the plurality of regions;
• and
• mold the supplied imprint material on the substrate with the mold to form the pattern of the mold on the substrate.