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US 10,504,763 B2Granted
Substrate transport vacuum platform
AssigneePersimmon Technologies Corporation
InventorsChristopher Hofmeister, Martin Hosek
Life of this patent
Estimating the term…
Abstract
A transport apparatus including a robot drive; an arm having a first end connected to the robot drive; and at least one end effector connected to a second end of the arm. The arm includes at least three links connected in series to, form the arm. The arm is configured to be moved by the robot drive to move the at least one end effector among load locks and two or more sets of opposing process modules.
Claims18
An apparatus comprising:
- a substrate transport chamber configured to have process modules and at least one load lock connected thereto, where the substrate transport chamber has a general elongate length extending along a centerline of the substrate transport chamber and a narrower width;
- a robot drive connected to the substrate transport chamber, where the robot drive is mounted to the substrate transport chamber at a singular fixed location on the substrate transport chamber, where the location is offset from the centerline of the substrate transport chamber;
- a robot arm having a first end connected to the robot drive, where the robot arm comprises at least three links connected in series;
- and
- at least one end effector connected to a second end of the robot arm.
2 more elements
An apparatus comprising:
- a substrate transport chamber configured to have process modules and at least one load lock connected thereto, where the substrate transport chamber has a general elongate length extending along a centerline of the substrate transport chamber and a narrower width;
- a robot drive connected to the substrate transport chamber, where the robot drive is located at a singular fixed location on the substrate transport chamber which is offset from the centerline of the substrate transport chamber;
- a robot arm having a first end connected to the robot drive, where the robot arm comprises at least three links connected in series;
- and
- at least one end effector connected to a second end of the robot arm,
- where the robot drive comprises coaxial drive shafts at the singular fixed location, where the robot arm forms four axes of rotation including a first axis of rotation at the coaxial drive shafts, a second axis of rotation between a first one of the links and a second one of the links, a third axis of rotation between the second link and a third one of the links, a fourth axis of rotation between the third link and that at least one end effector.
3 more elements
A method comprising:
- providing a substrate transport chamber configured to have process modules and at least one load lock connected thereto, where the substrate transport chamber has a general elongate length extending along a centerline of the substrate transport chamber and a narrower width;
- connecting a robot drive to the substrate transport chamber, where the robot drive is mounted to the substrate transport chamber at a singular fixed location on the substrate transport chamber, where the location is offset from the centerline of the substrate transport chamber;
- connecting a robot arm to the robot drive, where a first end of the robot arm is connected to the robot drive, and where the robot arm comprises at least three links connected in series;
- and
- connecting at least one end effector to a second end of the robot arm.
2 more elements
Dependencies are inferred from the claim text.