3D micro lithography-printing system using tilting and rotational UV-LED

A 3D micro lithography-printing system using tilting and rotational UV-LEDs, in which the lithography-printing system forms a pattern by irradiating ultraviolet light for lithography to a lithography object with a mask being laminated on a substrate, the lithography-printing system comprising:

• a main body including:
• a table;
• and a guide frame provided in a left and right horizontal direction at an upper portion of the table;
• a tilting stage including:
• a pair of first movable frames provided movable forward and backward on the table;
• a tilting frame connecting upper ends of the pair of first movable frames together, and being configured to be rotated forward and backward to change an angle;
• a rotatable plate provided horizontally rotatable left and right on an upper surface of the tilting frame;
• and a seating block provided on an upper surface of the rotatable plate, with the lithography object fixed to the seating block;
• a lithography unit including:
• a second movable frame provided movable in the left and right horizontal direction along the guide frame;
• and a lithography module configured to be horizontally rotated left and right about a central axis or horizontally revolved left and right about an imaginary axis at a front surface of the second movable frame, and provided with a plurality of UV LED lamps for lithography on a lower surface thereof for forming a pattern;
• and
• an alignment unit including:
• a third movable frame connected to a side of the second movable frame to be moved along the guide frame in the left and right horizontal direction along with the second movable frame;
• and a microscope coupled to a front surface of the third movable frame, and used to visually check whether the mask laminated on the substrate is aligned.