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US 10,500,695 B2Granted
Retaining ring having inner surfaces with features
AssigneeApplied Materials, Inc.
InventorsSteven Mark Reedy, Simon Yavelberg, Jeonghoon Oh, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate
Life of this patent
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