Batch processing apparatus

A collapsible substrate support for handling semiconductor substrates, comprising:

• a base coupled to a lift mechanism via a shaft extending through a floor of a batch processing chamber, wherein the base is moveable between a processing position and a transfer position;
• a first plurality of concentric tubular elements, wherein a first outermost tubular element is coupled to the base, wherein each of the first plurality of concentric tubular elements radially inward of the first outermost tubular element extends through an adjacent one of the first plurality of concentric tubular elements, and wherein a first innermost tubular element includes a first continuous upper surface and a shoulder that extends radially outwards and overlaps with a collar that extends radially inwards from an adjacent first tubular element;
• a second plurality of concentric tubular elements, wherein a second outermost tubular element is coupled to the base, wherein each of the second plurality of concentric tubular elements radially inward of the second outermost tubular element extends through an adjacent one of the second plurality of concentric tubular elements, and wherein a second innermost tubular element includes a second continuous upper surface and a shoulder that extends radially outwards and overlaps with a collar that extends radially inwards from an adjacent second tubular element;
• a first pin extending through the base and into the first innermost tubular element;
• and
• a second pin extending through the base and into the second innermost tubular element,
• wherein each of the first and second pluralities of concentric tubular elements includes support prongs disposed on an upper surface to support a substrate.

An apparatus for batch processing and handling of semiconductor substrates, comprising:

• a body having a floor and sidewalls defining a processing volume;
• and
• a collapsible substrate support disposed within the body, the collapsible substrate support comprising:
• a base linearly moveable between a first position and a second position;
• and
• a first plurality of substrate support elements coupled to the base and including a lowermost substrate support element disposed in a fixed position with respect to the base and an uppermost substrate support element disposed above the lowermost substrate support element, wherein the uppermost substrate support element is linearly movable between a first position nearer to the lowermost substrate support element and a second position further from the lowermost substrate support element, and wherein the uppermost substrate support element includes a shoulder that extends radially outwards and overlaps with a collar that extends radially inwards from an adjacent substrate support element.