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US 10,370,241 B2Granted
Physical quantity detection device, electronic apparatus, and moving object
AssigneeSeiko Epson Corporation
InventorShinya Aoki
Life of this patent
Estimating the term…
Abstract
A physical quantity detection device includes a semiconductor element and a physical quantity detection vibrator element a portion of which overlaps the semiconductor element in a plan view of the semiconductor element. The physical quantity detection vibrator element includes a drive portion including a drive electrode, and a detection portion. At least a partial region of the drive electrode does not overlap the semiconductor element in the plan view of the semiconductor element.
Claims12
A physical quantity detection device comprising:
- a semiconductor element;
- and
- a physical quantity detection vibrator element, a portion of which overlaps the semiconductor element in a plan view of the semiconductor element, wherein
- the physical quantity detection vibrator element includes
- a drive portion including a drive electrode, and
- a detection portion,
- at least a partial region of the drive electrode does not overlap the semiconductor element in the plan view of the semiconductor element, and
- the detection portion overlaps the semiconductor element in the plan view of the semiconductor element.
5 more elements
A physical quantity detection device comprising:
- a semiconductor element;
- and
- a physical quantity detection vibrator element, a portion of which overlaps the semiconductor element in a plan view of the semiconductor element, wherein
- the physical quantity detection vibrator element includes
- a drive portion including a drive electrode, and
- a detection portion,
- at least a partial region of the drive electrode does not overlap the semiconductor element in the plan view of the semiconductor element, and
- in the plan view of the semiconductor element, the drive portion includes a first drive portion and a second drive portion, and the semiconductor element is disposed between the first drive portion and the second drive portion.
5 more elements
A physical quantity detection device comprising:
- a semiconductor element;
- and
- a physical quantity detection vibrator element, a portion of which overlaps the semiconductor element in a plan view of the semiconductor element, wherein
- the physical quantity detection vibrator element includes
- a drive portion including a drive electrode, and
- a detection portion,
- at least a partial region of the drive electrode does not overlap the semiconductor element in the plan view of the semiconductor element,
- the physical quantity detection vibrator element includes
- a base portion,
- a first coupling portion extending from the base portion along a first direction, and
- a second coupling portion extending from the base portion along a direction opposite to the first direction,
- the drive portion includes
- a first driving vibrating arm extending from the first coupling portion along a second direction intersecting the first direction,
- a second driving vibrating arm extending from the first coupling portion along a direction opposite to the second direction,
- a third driving vibrating arm extending from the second coupling portion along the second direction, and
- a fourth driving vibrating arm extending from the second coupling portion along the direction opposite to the second direction, and
- the detection portion includes
- a first detecting vibrating arm extending from the base portion along the second direction, and
- a second detecting vibrating arm extending from the base portion along the direction opposite to the second direction.
16 more elements
Dependencies are inferred from the claim text.