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US 10,312,127 B2Granted
Compliant robot blade for defect reduction
AssigneeApplied Materials, Inc.
InventorsSteven V. Sansoni, Jeffrey Brodine, Glen Mori
Life of this patent
Estimating the term…
Abstract
Embodiments of substrate transfer robot blades to engage and support a substrate during transfer are provided herein. In some embodiments, a substrate transfer robot may include a blade body having a blade support surface; and a plurality of compliant pads, each comprising a contact surface and an opposite bottom surface supported by the body and arranged to support a substrate when disposed on the substrate transfer robot blade.
Claims13
A substrate transfer robot blade, comprising:
- a blade body having a blade support surface and a passage formed in the blade support surface, wherein the passage has a bottom wall above a bottom surface of the blade body;
- at least three compliant pads each larger in size than the passage in the blade support surface, each pad comprising a curved substrate contact surface and a pad bottom surface and arranged to support a substrate when disposed on the substrate transfer robot blade, wherein at least one of the at least three compliant pads has a projection from a pad bottom surface and at least a portion of the projection is disposed within the passage;
- and
- a resilient element disposed at least partially within the passage and configured to engage a wall of the passage and a surface of the projection of the at least one of the at least three compliant pads to enable displacement of the at least one of the at least three compliant pads in a direction generally parallel to a passage axis.
1 more element
Dependencies are inferred from the claim text.