High-brightness light source
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTsiao-Chen Wu, Chun-Lin Louis Chang
Life of this patent
Estimating the term…
Abstract
A method for generating high-brightness light sources is provided. The method includes introducing a gaseous material into the target material. The method further includes supplying the target material into a fuel target generator. The method also includes generating targets by forcing the target material with the gaseous material out of the fuel target generator. In addition, the method includes expanding the gaseous material in the targets to transform the targets to target mists. The method also includes focusing a main pulse laser on the target mists to generate plasma emitting high-brightness light.
Claims20
A method for generating high-brightness light, comprising:
- generating a gaseous material in a target material, wherein the gaseous material comprises a gas compound;
- decomposing the gas compound in the target material to a gaseous phase product;
- supplying the target material having the gaseous phase product into a fuel target generator;
- generating targets by forcing the target material with the gaseous material out of the fuel target generator;
- expanding the gaseous material in the targets to transform the targets to target mists;
- and
- focusing a main pulse laser on the target mists to generate plasma that emits high-brightness light.
A method for generating high-brightness light, comprising:
- providing ions into a target material to generate a gaseous material in the target material;
- delivering targets through a fuel target generator;
- expanding the targets to target mists, wherein the targets comprise the gaseous material;
- and
- focusing a main pulse laser on the target mists to generate plasma that emits high-brightness light.
A high-brightness light source, comprising:
- means for providing ions to generate a gaseous material in a target material;
- a fuel target generator configured to generate a plurality of targets from the target material that contains the gaseous material;
- a pre-pulse laser;
- a main pulse laser having a higher energy than the pre-pulse laser;
- and
- a controller configured to fire the pre-pulse laser and the main pulse laser to hit the targets in sequence.
Dependencies are inferred from the claim text.