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US 10,309,013 B2Granted
Method and system for identifying a clean endpoint time for a chamber
AssigneeApplied Materials, Inc.
InventorsIlias Iliopoulos, Shuo Na, Jose Albor
Life of this patent
Estimating the term…
Abstract
Systems and methods are provided for determining a clean endpoint time for a current run of a chamber. The clean endpoint time for the current run may be determined by determining that a chamber parameter, such as a chamber pressure, has stabilized. Historical clean endpoint time data is updated by adding the clean endpoint time for the current run of the chamber. A recommended clean endpoint time is then determined for the chamber based on the updated historical clean endpoint time data.
Claims14
A method comprising:
- determining, by a processing device, a clean endpoint time for a current run of a chamber by determining that a chamber pressure of the current run has stabilized;
- retrieving, by the processing device, historical clean endpoint time data that is based on tracking of a time evolution profile of the chamber pressure during chamber cleaning over a historical period;
- updating, by the processing device, the historical clean endpoint time data by adding the clean endpoint time for the current run of the chamber to the historical clean endpoint time data;
- computing, by the processing device, a recommended clean endpoint time for the chamber to minimize an effect of run-to-run fluctuation of the chamber pressure over the historical period, wherein the recommended clean endpoint time for the chamber is computed based on the updated historical clean endpoint time data using a subset of the updated historical clean endpoint time data, the subset corresponding to a time window that comprises the clean endpoint time for the current run;
- and
- causing the current run of the chamber to end at the recommended clean endpoint time for the chamber.
3 more elements
A system comprising:
- a memory to store historical clean endpoint time data that is based on tracking a time evolution profile of the chamber pressure during chamber cleaning over a historical period;
- and a processing device, coupled to the memory, to:
- determine a clean endpoint time for a current run of a chamber by determining that a chamber pressure of the current run has stabilized;
- retrieve the stored historical clean endpoint time data;
- update the historical clean endpoint time data by adding the clean endpoint time for the current run of the chamber to the historical clean endpoint time data;
- compute a recommended clean endpoint time for the chamber to minimize an effect of run-to-run fluctuation of the chamber pressure over the historical period, wherein the recommended clean endpoint time for the chamber is computed based on the updated historical clean endpoint time data using a subset of the updated historical clean endpoint time data, the subset corresponding to a time window that comprises the clean endpoint time for the current run;
- and
- cause the current run of the chamber to end at the recommended clean endpoint time for the chamber.
5 more elements
A non-transitory computer-readable storage medium storing instructions which, when executed, cause a processing device to perform the operations of:
- determining, by a processing device, a clean endpoint time for a current run of a chamber by determining that a chamber pressure of the current run has stabilized;
- retrieving, by the processing device, historical clean endpoint time data that is based on tracking of a time evolution profile of the chamber pressure during chamber cleaning over a historical period;
- updating, by the processing device, the historical clean endpoint time data by adding the clean endpoint time for the current run of the chamber to the historical clean endpoint time data;
- computing, by the processing device, a recommended clean endpoint time for the chamber to minimize an effect of run-to-run fluctuation of the chamber pressure over the historical period, wherein the recommended clean endpoint time for the chamber is computed based on the updated historical clean endpoint time data using a subset of the updated historical clean endpoint time data, the subset corresponding to a time window that comprises the clean endpoint time for the current run;
- and
- causing the current run of the chamber to end at the recommended clean endpoint time for the chamber.
3 more elements
Dependencies are inferred from the claim text.