Substrate holding apparatus

A substrate rotating apparatus comprising:

• a rotational shaft;
• a base secured to the rotational shaft;
• a support post movable in an axial direction relative to the base;
• a chuck provided on the support post and configured to hold a periphery of a substrate;
• a spring biasing the support post in the axial direction, the spring being additionally compressed when the substrate is to be unloaded;
• a motor coupled to the rotational shaft and configured to rotate at least the support post, the chuck, and the spring;
• a first structure fixed to a bottom surface of the base and extending downwardly from the bottom surface of the base to restrict a movement of an upper portion of the spring in a direction perpendicular to the axial direction of the support post, the first structure being disposed inside the spring and having an outer circumferential surface that supports at least an upper half of spring from inside when the spring is rotated by the motor;
• and
• a second structure configured to restrict a movement of a lower portion of the spring in a direction perpendicular to the axial direction of the support post, the second structure having an inner cylindrical surface that supports the lower portion of the spring from outside when the spring is rotated by the motor, an axial length of the inner cylindrical surface of the second structure being larger than a diameter of the inner cylindrical surface of the second structure, a part of the first structure being housed in the second structure when the spring is additionally compressed.

A substrate rotating apparatus comprising:

• a rotational shaft;
• a base secured to the rotational shaft;
• a support post movable in an axial direction relative to the base;
• a chuck provided on the support post and configured to hold a periphery of a substrate;
• a spring biasing the support post in the axial direction, the spring being additionally compressed when the substrate is to be unloaded;
• a motor coupled to the rotational shaft and configured to rotate at least the support post, the chuck, and the spring;
• a rotary cup that can surround the substrate;
• a moving mechanism configured to move the support post in the axial direction against a force of the spring, the moving mechanism being configured to move the support post between a lower position where the substrate is to be processed within the rotary cup and a substrate transfer position higher than the rotary cup;
• a first structure fixed to a bottom surface of the base and extending downwardly from the bottom surface of the base to restrict a movement of an upper portion of the spring in a direction perpendicular to the axial direction of the support post, the first structure having an inner cylindrical surface that surrounds at least an upper half of the spring when the spring is rotated by the motor;
• and
• a second structure configured to restrict a movement of a lower portion of the spring in a direction perpendicular to the axial direction of the support post, the second structure being disposed inside the spring and having an outer surface that supports the lower portion of the spring,
• wherein at least upper half of the second structure is located in the first structure when the spring is additionally compressed, and the additionally compressed spring is located in a cylindrical space formed between the inner surface of the first structure and the outer surface of the second structure.

A substrate rotating apparatus comprising:

• a rotational shaft;
• a base secured to the rotational shaft;
• a support post movable in an axial direction relative to the base;
• a chuck provided on the support post and configured to hold a periphery of a substrate;
• a spring biasing the support post in the axial direction, the spring being additionally compressed when the substrate is to be unloaded;
• a motor coupled to the rotational shaft and configured to rotate at least the support post, the chuck, and the spring;
• a rotary cup that can surround the substrate;
• a moving mechanism configured to move the support post in the axial direction against a force of the spring, the moving mechanism being configured to move the support post between a lower position where the substrate is to be processed within the rotary cup and a substrate transfer position higher than the rotary cup;
• a first structure fixed to a bottom surface of the base and extending downwardly from the bottom surface of the base to restrict a movement of an upper portion of the spring in a direction perpendicular to the axial direction of the support post, the first structure being disposed inside the spring and having an outer surface that supports at least an upper half of the spring from inside when the spring is rotated by the motor;
• and
• a second structure configured to restrict a movement of a lower portion of the spring in a direction perpendicular to the axial direction of the support post, the second structure having an inner cylindrical surface that supports the lower portion of the spring from outside when the spring is rotated by the motor, an axial length of the second structure being larger than a diameter of the inner cylindrical surface of the second structure,
• wherein a part of the first structure is located in the second structure when the spring is additionally compressed, and the additionally compressed spring is located in a cylindrical space formed between the inner surface of the second structure and the outer surface of the first structure.