Treatment solution supply method, non-transitory computer-readable storage medium, and treatment solution supply apparatus

A treatment solution supply method of supplying a treatment solution onto a substrate, the method comprising:

• a degassed treatment solution generating step of removing bubbles dissolved in the treatment solution by a degassing mechanism to generate a degassed treatment solution;
• a treatment solution storing step of storing the degassed treatment solution in a container;
• a filter solution-passing step of bringing a downstream side from a filter connected to a downstream side from the container via a treatment solution supply pipe to a negative pressure with respect to a pressure in the container to pass the degassed treatment solution in the container through the filter;
• and
• a both-direction degassing step of reducing a pressure from an upstream side and the downstream side from the filter to degas the treatment solution, after stopping the supply of the treatment solution from the container to the filter.

A non-transitory computer-readable storage medium storing a program running on a computer of a control unit for controlling a treatment solution supply apparatus to cause the treatment solution supply apparatus to perform a treatment solution supply method of supplying a treatment solution onto a substrate,

• the treatment solution supply method comprising:
• a degassed treatment solution generating step of removing bubbles dissolved in the treatment solution by a degassing mechanism to generate a degassed treatment solution;
• a treatment solution storing step of storing the degassed treatment solution in a container;
• a filter solution-passing step of bringing a downstream side from a filter connected to a downstream side from the container via a treatment solution supply pipe to a negative pressure with respect to a pressure in the container to pass the degassed treatment solution in the container through the filter;
• and
• a negative pressure maintaining step of maintaining a state in which the downstream side from the filter is brought to the negative pressure, for a predetermined period, after stopping supply of the treatment solution from the container to the filter.

A non-transitory computer-readable storage medium storing a program running on a computer of a control unit for controlling a treatment solution supply apparatus to cause the treatment solution supply apparatus to perform a treatment solution supply method of supplying a treatment solution onto a substrate,

• the treatment solution supply method comprising:
• a degassed treatment solution generating step of removing bubbles dissolved in the treatment solution by a degassing mechanism to generate a degassed treatment solution;
• a treatment solution storing step of storing the degassed treatment solution in a container;
• a filter solution-passing step of bringing a downstream side from a filter connected to a downstream side from the container via a treatment solution supply pipe to a negative pressure with respect to a pressure in the container to pass the degassed treatment solution in the container through the filter;
• and
• a both-direction degassing step of reducing a pressure from an upstream side and the downstream side from the filter to degas the treatment solution, after stopping supply of the treatment solution from the container to the filter.