Back to results
US 10,119,191 B2Granted
High flow gas diffuser assemblies, systems, and methods
AssigneeApplied Materials, Inc.
InventorTravis Morey
Life of this patent
Estimating the term…
Abstract
Porous diffuser assemblies including multiple diffuser elements. The porous diffuser assemblies include a diffuser body, a diffuser base coupled to the diffuser body and forming a plenum there between, the diffuser base including a plurality of openings formed therein, and a porous diffuser element disposed in each of the plurality of openings wherein surfaces of the porous diffuser elements are exposed to the plenum. Gas purged chambers and methods of purging a chamber are disclosed, as are numerous other aspects.
Claims10
A gas purged chamber, comprising:
- a chamber configured to contain a substrate therein;
- and
- a gas diffuser assembly coupled to the chamber, the gas diffuser assembly including:
- a diffuser body,
- a diffuser base coupled to the diffuser body and forming a gas plenum there between, the diffuser base including a plurality of openings formed therein, and
- a porous diffuser element disposed in each of the plurality of openings.
3 more elements
Dependencies are inferred from the claim text.