Controller for actuating a micromechanical actuator, actuating system for actuating a micromechanical actuator, micro-mirror system and method for actuating a micromechanical actuator

A controller for actuating a micromechanical actuator, comprising a control system, the control system including at least one of:

• an application specific integrated circuit (ASIC), or a processor configured to execute program instructions stored on a non-transitory machine-readable medium;
• wherein the at least one of the ASIC or the processor executing the program instructions is configured to implement:
• a first signal generator to output a reference signal representing a desired position of the micromechanical actuator;
• a controller arrangement to receive the reference signal and to output a control signal for the micromechanical actuator;
• a first signal processing unit to process the control signal and to transmit it to the micromechanical actuator;
• and
• a second signal processing unit to record a position of the micromechanical actuator in response to the control signal and to transmit a measuring signal to the controller, which denotes the recorded position;
• wherein the controller arrangement includes:
• a first signal input to receive the reference signal;
• a second signal input to receive the measuring signal;
• a first linear controller element to filter and/or attenuate the received reference signal by filtering and/or attenuating predefined frequency modes in the received reference signal and to output the filtered and/or attenuated reference signal;
• a second linear controller element to modify the received measuring signal by minimizing the quality of the first mode of the micromechanical actuator in the received measuring signal by processing the received measuring signal in the closed loop circuit, and to output the modified measuring signal;
• a third linear controller element to minimize the deviation between the filtered and/or the attenuated reference signal and the received measuring signal and to output a minimized reference signal based on the minimizing;
• and
• a fourth linear controller element to rotate the phase of the difference between the minimized reference signal and the modified measuring signal for at least one predefined frequency and to transmit the difference between the minimized reference signal and the modified measuring signal with the rotated phase as the control signal to the micromechanical actuator;
• wherein the first linear controller element, the second linear controller element, the third linear controller element, and the fourth linear controller element implement only linear functions.

A micro-mirror system, comprising:

• at least one micro-mirror;
• and
• at least one actuating system to actuate the micro-mirror;
• wherein the at least one actuating system includes at least one of:
• an application specific integrated circuit (ASIC), or a processor configured to execute program instructions stored on a non-transitory machine-readable medium;
• wherein the at least one of the ASIC or the processor executing the program instructions is configured to implement:
• a first signal generator to output a reference signal representing a desired position of a micromechanical actuator;
• a controller arrangement to receive the reference signal and to output a control signal for the micromechanical actuator;
• a first signal processing unit to process the control signal and to transmit it to the micromechanical actuator;
• and
• a second signal processing unit to record a position of the micromechanical actuator in response to the control signal and to transmit a measuring signal to the controller, which denotes the recorded position;
• wherein the controller arrangement includes:
• a first signal input to receive the reference signal;
• a second signal input to receive the measuring signal;
• a first linear controller element to filter and/or attenuate the received reference signal by filtering and/or attenuating predefined frequency modes in the received reference signal and to output the filtered and/or attenuated reference signal;
• a second linear controller element to modify the received measuring signal by minimizing the quality of the first mode of the micromechanical actuator in the received measuring signal by processing the received measuring signal in the closed loop circuit, and to output the modified measuring signal;
• a third linear controller element to minimize the deviation between the filtered and/or the attenuated reference signal and the received measuring signal and to output a minimized reference signal based on the minimizing;
• and
• a fourth linear controller element to rotate the phase of the difference between the minimized reference signal and the modified measuring signal for at least one predefined frequency and to transmit the difference between the minimized reference signal and the modified measuring signal with the rotated phase as the control signal to the micromechanical actuator;
• wherein the first linear controller element, the second linear controller element, the third linear controller element, and the fourth linear controller element implement only linear functions.

A method for actuating a micromechanical actuator, the method performed using at least one of:

• an application specific integrated circuit (ASIC), or a processor configured to execute program instructions stored on a non-transitory machine-readable medium;
• the method comprising:
• receiving, by the at least one of the ASIC or the processor, a reference signal representing a desired position of a micromechanical actuator;
• receiving, by the at least one of the ASIC or the processor, a measuring signal which denotes a recorded position of the micromechanical actuator in response to a control signal;
• filtering and/or attenuating, by a first linear controller element implemented by the at least one of the ASIC or the processor executing the program instructions, the received reference signal by filtering and/or attenuating predefined frequency modes in the reference signal;
• modifying, by a second linear controller element implemented by the at least one of the ASIC or the processor executing the program instructions, the received measuring signal by minimizing the quality of the first mode in the received measuring signal by processing the received measuring signal in the closed loop circuit;
• minimizing, by a third linear controller element implemented by the at least one of the ASIC or the processor executing the program instructions, the deviation between the filtered and/or attenuated reference signal and the modified measuring signal, and outputting, by the third linear control element, a minimized reference signal based on the minimizing;
• rotating, by a fourth linear controller element implemented by the at least one of the ASIC or the processor executing the program instructions, the phase of the difference between the minimized reference signal and the modified measuring signal for at least one predefined frequency;
• and
• transmitting, by the at least one of the ASIC or the processor, the difference between the minimized reference signal and the modified measuring signal with the rotated phase as the control signal to the micromechanical actuator;
• wherein the first linear controller element, the second linear controller element, the third linear controller element, and the fourth linear controller element implement only linear functions.