Thin film diamond coating system and method
AssigneeAkhan Semiconductor, Inc.
InventorsAdam Khan, Robert Polak
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Abstract
Disclosed herein is a transparent glass system that includes an optical grade silicon substrate, and a nanocrystalline diamond film on the silicon substrate, the diamond film deposited using a chemical vapor deposition system having a reactor in which methane, hydrogen and argon source gases are added. Further disclosed is a method of fabricating transparent glass that includes the steps of seeding an optical grade silicon substrate and forming a nanocrystalline diamond film on the silicon substrate using a chemical vapor deposition system having a reactor in which methane, hydrogen and argon source gases are added.
Claims23
A transparent glass for electronics, comprising:
- a BK7 silicon substrate;
- a nanocrystalline diamond film of approximately 113 nm on the BK7 silicon substrate, the diamond film deposited using a chemical vapor deposition system having a reactor in which methane, hydrogen and argon source gases are added wherein the transmission of light through the silicon substrate and the nanocrystalline diamond film at 550 nm wavelength is in excess of 0.90 and the transmission of light between 350 nm and 450 nm wavelength is less than 0.80 and the transmission of light between 750 nm and 850 am is less than 0.80.
A transparent display comprising:
- a glass substrate;
- and
- a nanocrystalline diamond film formed on the glass substrate, wherein the nanocrystalline diamond film comprises a thickness from about 102 nm to about one micrometer;
- wherein transmission of light through the glass substrate and the nanocrystalline diamond film is such that:
- at least 88% of light comprising a wavelength of 550 nm passes through the transparent display;
- less than 80% of light comprising a wavelength between 350 nm and 450 nm passes through the transparent display;
- and
- less than 80% of light comprising a wavelength between 750 nm and 850 nm passes through the transparent display.
Dependencies are inferred from the claim text.