Quadrupole mass spectrometer
AssigneeMKS Instruments, Inc.
InventorPaul V. Foley
Life of this patent
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AssigneeMKS Instruments, Inc.
InventorPaul V. Foley
Estimating the term…
A quadrupole mass spectrometer includes means for measuring total ion current having an electron repeller cage disposed about an electron source filament. The electron repeller cage repels electrons emitted by the electron source filament, urging them away from both the repeller and the filament, while also attracting positive ions. When the positive ions contact the electron repeller cage, a current is induced that is measured at the electron repeller cage. The measured current represents total ion current transmitted through the spectrometer. Thus, the need to include a total pressure measurement plate to measure total ion current is eliminated, and since the ion-exposed surface area of the electron repeller cage is greater than the ion-exposed surface area of the total pressure measurement plate, the invention provides improved total pressure measurement sensitivity.
A quadrupole mass spectrometer for measuring the relative amounts of the respective constituents of a gas present in said spectrometer, said spectrometer being of the type comprising a quadrupole mass filter, the quadrupole mass spectrometer comprising:
A quadrupole mass spectrometer according to claim ..1.!. 9 , wherein electron source means for producing electrons comprises a filament disposed in said space.
A quadrupole mass spectrometer according to claim ..1.!. 9 , wherein said ion source means comprises a ion source cage.
A quadrupole mass spectrometer according to claim ..1.!. 9 , wherein said means for generating an ion current from the ions produced inside said ion source means so that said ion current represents the relative amounts of said constituents comprises a quadrupole mass filter.
A quadrupole mass spectrometer according to claim ..1.!. 9 , wherein said means for propelling said electrons produced by said electron source means through said space into said ion source means so that positive ions of each said constituent are produced in said space includes means for biasing said electron repeller means relative to said electron source means and said ion source means.
A quadrupole mass spectrometer for measuring the relative amounts of mass of one or more constituents, respectively of different molecular weights, of a gas, said spectrometer comprising:
In a quadrupole mass spectrometer comprising an electron source filament, the electron source filament carrying a current of sufficient magnitude such that electrons having a negative charge are emitted by the electron source filament, the electrons being accelerated towards an ion source cage by an electric field in the region between an electron repeller cage and the ion source cage, positive ions being produced both inside and outside the ion source cage when the accelerated electrons strike neutral gas particles along the path of the electrons, the positive ions within the ion source cage being accelerated towards a quadrupole mass filter by a focus plate, the quadrupole mass filter including a quadrilaterally symmetric parallel array of four charge-balanced rods, the improvement comprising:
A mass spectrometer for measuring the relative amount of the respective constituents of a gas present in said spectrometer and including a gas analyzer, the mass spectrometer comprising:
A mass spectrometer for measuring the relative amounts of mass of one or more constituents of a gas, said spectrometer comprising:
In a mass spectrometer comprising an electron source filament, the electron source filament carrying a current of sufficient magnitude such that electrons having a negative charge are emitted by the electron source filament, the electrons being accelerated towards a space by an electric field in the region between the electron source and the space, positive ions being produced both inside and outside the space when the accelerated electrons strike neutral gas particles along the path of the electrons, the improvement comprising:
A quadrupole mass spectrometer for measuring the relative amounts of the respective constituents of a gas present in said spectrometer, said spectrometer being of the type comprising a quadrupole mass filter, the quadrupole mass spectrometer comprising:
A quadrupole mass spectrometer for measuring the relative amounts of mass of one or more constituents, respectively, of a gas, said spectrometer comprising:
Dependencies are inferred from the claim text.