Back to results
US D980,177 S1Granted
Ceiling heater for substrate processing apparatus
AssigneeKokusai Electric Corporation
InventorsShinobu Sugiura, Tetsuya Kosugi, Yuya Yoshimura, Takuto Shoji
Life of this patent
Estimating the term…
Abstract
The abstract isn’t available for this document.
Claims1
The ornamental design for a ceiling heater for substrate processing apparatus, as shown and described.