US D491,206 S1Granted

Electrostatic chuck

AssigneeNgk Spark Plug Co., Ltd.

InventorKeisuke Okugawa

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Abstract

The abstract isn’t available for this document.

Claims1

Dependent claims

The ornamental design for a electrostatic chuck, as shown and described.

Facts

Application: 29/183,944Filed 20 Jun 2003
Priority: JP 2002-03556320 Dec 2002
Granted: 8 Jun 2004
Term ends: Not estimatedThe source records don’t support an estimate.

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