Substrate storing container
AssigneesMiraial Co., Ltd., Shin-Etsu Polymer Co., Ltd.
InventorYuta Kanamori
Life of this patent
Estimating the term…
Abstract
The lateral substrate support part has: a plurality of plate parts, which have a parallel positional relationship, and support end portions of a plurality of substrates; and a plate-part support part, which supports the plate part, and is fixed to a side wall. The plate-part support part has: a groove-forming portion having a groove formed therein, said groove linearly extending over the whole plate parts in the direction intersecting the plate parts; a protrusion, which is formed in the groove, and which protrudes such that the protrusion reduces the width of the groove in the direction orthogonal to the direction in which the groove extends; and a positioned part that is formed at a center portion of the groove in the direction in which the groove extends.
Claims8
A substrate storing container, comprising:
- a container main body including a tubular wall portion with a container main body opening portion formed at one end portion and the other end portion closed, the wall portion having a back wall, an upper wall, a lower wall, and a pair of side walls, the container main body opening portion being formed by one end portion of the upper wall, one end portion of the lower wall, and one end portions of the side walls, wherein a substrate storing space that can store a plurality of substrates and is in communication with the container main body opening portion is formed by an inner face of the upper wall, an inner face of the lower wall, inner faces of the side walls, and an inner face of the back wall;
- a lid body that is removably attached to the container main body opening portion and can close the container main body opening portion;
- lateral substrate support parts that are disposed to be fixed to the pair of side walls so as to form a pair inside of the substrate storing space, and can support edge parts of a plurality of substrates when the container main body opening portion is not closed by the lid body, in a state in which adjacent substrates among the plurality of substrates are arranged in parallel to be separated by a predetermined interval,
- wherein the lateral substrate support parts include a plurality of plate parts having a parallel positional relationship and supporting the edge parts of the plurality of substrates;
- and a plate-part support part that supports the plate part and is fixed to the side wall, wherein the plate-part support part includes:
- a groove forming portion in which a groove that linearly extends over the entirety of the plurality of plate parts in a direction intersecting the plurality of plate parts is formed;
- a protrusion that is formed inside the groove and projects so as to narrow the width of the groove in a direction orthogonal to an extending direction of the groove, and a positioned part that is formed at a central part of the groove in the extending direction of the groove, and
- wherein a groove-fitting rib part that linearly extends to be able to fit in the groove is disposed at an inner face of the side wall, and a positioning part that can engage with the positioned part is disposed at a central part of the groove fitting rib part in an extending direction of the groove-fitting rib part.
Dependencies are inferred from the claim text.