Deposition apparatus
AssigneeSamsung Display Co., Ltd.
InventorJaebum Pahk
Life of this patent
Estimating the term…
Abstract
A deposition apparatus including a crucible to receive the deposition material and in which a deposition material is evaporated; a linear deposition source having a sprayer to spray the evaporated deposition material; a first connection portion and a second connection portion spaced apart from each other by a predetermined interval, the first connection portion and the second connection portion connecting the linear deposition source to the crucible at an upper surface of the crucible; and a heater in the crucible to apply heat to the deposition material, wherein the upper surface of the crucible has a first convex portion and a second convex portion successively formed between the first connection portion and the second connection portion.
Claims7
A deposition apparatus, comprising:
- a crucible to receive the deposition material and in which a deposition material is evaporated;
- a linear deposition source having a sprayer to spray the evaporated deposition material;
- a first connection portion and a second connection portion spaced apart from each other by a predetermined interval, the first connection portion and the second connection portion connecting the linear deposition source to the crucible at an upper surface of the crucible;
- and
- a heater in the crucible to apply heat to the deposition material,
- wherein the upper surface of the crucible has a first convex portion and a second convex portion successively formed between the first connection portion and the second connection portion, and
- wherein:
- the heater includes a plurality of first heaters and a plurality of second heaters,
- the plurality of first heaters extend in one direction and are arranged next to each other to be separated from each other by a predetermined pitch, and
- the plurality of second heaters extend in a direction perpendicular to the one direction and are arranged next to each other to be separated from each other by a predetermined pitch.
Dependencies are inferred from the claim text.