Imprint apparatus and method of manufacturing article

An imprint apparatus which forms a pattern of an imprint material on a substrate using a mold, the apparatus comprising:

• a driving unit configured to drive at least one of the mold and the substrate;
• a measurement unit configured to measure a position deviation amount between the mold and the substrate in a direction parallel to a surface of the substrate;
• and
• a control unit configured to control the driving unit based on the measured position deviation amount, in a period for performing alignment between the mold and the substrate before a start of curing the imprint material on the substrate,
• wherein the period includes a first period from a start of contact between the mold and the imprint material until a distance between the mold and the substrate falls within a target range, and a second period in which the distance is maintained within the target range, and
• wherein the control unit is configured to generate a command value for controlling a driving force of the driving unit in the direction parallel to the surface of the substrate, based on the measured position deviation amount, and change an amplification factor to be used to generate the command value such that the amplification factor in the second period is larger than that in the first period.