Method and apparatus for pellicle removal
AssigneeRave, LLC
InventorsBrian J. Grenon, James Boyette, Alexander M. Figliolini
Life of this patent
Estimating the term…
Abstract
A method and apparatus for removing a pellicle from a photomask wherein the adhesive between the pellicle frame and photomask is cooled sufficiently to allow the adhesive property of the adhesive to diminish to the point where the adhesive will release from the photomask with little or no mechanical force and leaving minimal adhesive on the photomask. The adhesive is cooled by way of manifolds containing coolant being brought in contact with the pellicle frame or by way of a coolant spray nozzles spraying coolant directly onto the pellicle frame.
Claims20
A method comprising the steps of:
- cooling an adhesive between a frame of a pellicle and a photomask to a temperature where the adhesive separates from the photomask;
- wherein the step of cooling the adhesive comprises the steps of:
- insulating a portion of the photomask;
- and
- cooling a frame of the pellicle;
- and
- removing the pellicle from the photomask.
An apparatus comprising:
- a first manifold containing cooling fluid, wherein the first manifold is placed in contact with a first portion of a frame of a pellicle affixed to a photomask with an adhesive, wherein contact of the first manifold with the first portion of the pellicle frame cools the adhesive to a temperature where the adhesive separates from the photomask;
- and
- adjustable supports, wherein the adjustable supports secure the first manifold relative to the pellicle frame and the photomask, wherein movement of the pellicle frame relative to the photomask removes the pellicle from the photomask.
An apparatus comprising:
- a first coolant spray nozzle, wherein the first coolant spray nozzle is oriented to spray coolant onto a first portion of a frame of a pellicle affixed to a photomask with an adhesive, wherein the coolant spray from the first coolant nozzle on the pellicle frame cools the adhesive to a temperature where the adhesive separates from the photomask;
- an adjustable support, wherein the adjustable support secures the pellicle relative to the coolant spray nozzle, wherein movement of the pellicle frame relative to the photomask removes the pellicle from the photomask;
- and
- a barrier, wherein the barrier is oriented to shield a portion of the photomask from the spray coolant.
Dependencies are inferred from the claim text.