Adjustment apparatus for adjusting processing units provided in a substrate processing apparatus, and a substrate processing apparatus having such an adjustment apparatus

A substrate processing apparatus comprising:

• processing stations for performing designated operations on a substrate;
• and
• an adjustment system for adjusting the processing stations, the adjustment system including:
• a main terminal having software installed therein that instructs the main terminal to adjust the designated operations of the processing stations;
• secondary terminals having software installed therein that instructs the secondary terminals to adjust the designated operations of the processing stations, each of the main terminal and the secondary terminals having a user interface;
• a network that connects the processing stations, secondary terminals, and the main terminal to each other;
• and
• connection ports that removably connect the secondary terminals to the network, wherein each of the secondary terminals has a function to request an exclusive manipulation right that allows one secondary terminal to exclusively manipulate at least one processing station selected from the processing stations, and the main terminal has a function to reject the request from the secondary terminal if an exclusive manipulation right has already been established for the selected processing station.