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US 9,882,334 B2Granted
Mirror device
AssigneeGigaphoton Inc.
InventorsToru Suzuki, Yukio Watanabe, Miwa Igarashi, Osamu Wakabayashi
Life of this patent
Estimating the term…
Abstract
A mirror device may include: an optical element configured to reflect part of a laser beam and transmit the other part of the laser beam therethrough; and a holder in surface contact with the optical element to hold the optical element. A flatness of a contact surface of the holder in contact with the optical element may be equal to or smaller than a flatness of the optical element.
Claims9
A mirror device comprising:
- an optical element configured to reflect part of a laser beam and transmit the other part of the laser beam therethrough;
- and
- a holder in surface contact with the optical element to hold the optical element,
- wherein a flatness of a contact surface of the holder in contact with a first surface of the optical element is equal to or smaller than a flatness of the first surface of the optical element, and
- wherein the holder includes:
- a support member having the contact surface in surface contact with the first surface of the optical element to support the optical element;
- and
- a pushing member configured to push the optical element against the support member by pushing a second surface of the optical element.
5 more elements
A mirror device comprising:
- an optical element configured to reflect part of a laser beam and transmit the other part of the laser beam therethrough;
- and
- a holder in surface contact with the optical element to hold the optical element,
- wherein, when a wavelength of the laser beam reflected from a surface of the optical element is λ, a flatness of a contact surface of the holder in contact with the optical element is equal to or smaller than one-fifth of λ.
1 more element
Dependencies are inferred from the claim text.