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US 9,870,934 B2Granted
Electrostatic chuck and temperature-control method for the same
AssigneeMicron Technology, Inc.
InventorYi Chang
Life of this patent
Estimating the term…
Abstract
An electrostatic chuck includes a chuck base and cooling pipes. The chuck base has at least four cooling zones, in which the cooling zones viewed at a direction normal to the chuck base are fan-shaped. The cooling pipes are respectively disposed in the cooling zones of the chuck base. Therefore, the cooling pipes disposed in the different cooling zones can be controlled individually.
Claims16
An electrostatic chuck, comprising:
- a chuck base having at least four cooling zones, wherein the cooling zones viewed at a direction normal to the chuck base are fan-shaped;
- a plurality of cooling pipes respectively disposed in the cooling zones of the chuck base;
- a plurality of additional cooling pipes respectively disposed in the cooling zones of the chuck base;
- wherein each of the additional cooling pipes is surrounded by a corresponding cooling pipe in each of the cooling zones.
1 more element
An electrostatic chuck, comprising:
- a chuck base having at least four cooling zones, wherein the cooling zones viewed at a direction normal to the chuck base are fan-shaped;
- and
- a plurality of cooling pipes respectively disposed in the cooling zones of the chuck base;
- wherein a first group and a second group of the cooling pipes are respectively provided with a first cooling liquid and a second cooling liquid, and a liquid velocity of the first cooling liquid is different from a liquid velocity of the second cooling liquid.
1 more element
An electrostatic chuck, comprising:
- a chuck base having two first cooling zones and two second cooling zones, wherein the first cooling zones and the second cooling zones viewed at a direction normal to the chuck base are fan-shaped and are arranged alternately;
- a plurality of first cooling pipes disposed in the first cooling zones of the chuck base, wherein the first cooling pipes are provided with cooling liquids with a first liquid velocity;
- and
- a plurality of second cooling pipes disposed in the second cooling zones of the chuck base, wherein the second cooling pipes are provided with cooling liquids with a second liquid velocity, and the first liquid velocity is greater than the second liquid velocity.
1 more element
A temperature-control method for an electrostatic chuck, comprising:
- individually controlling temperatures of at least four cooling zones of a chuck base, wherein the cooling zones viewed at a direction normal to the chuck base are fan-shaped;
- providing a first group of a plurality of cooling pipes disposed in the cooling zones with first cooling liquid;
- providing a second group of a plurality of cooling pipes disposed in the cooling zones with second cooling liquid;
- and
- controlling liquid velocity of the first cooling liquid to be V1 and controlling liquid velocity of the second cooling liquid to be V2, and V1>V2.
2 more elements
Dependencies are inferred from the claim text.