Sliding parts and processing method of sliding parts

A pair of sliding parts comprising sealing faces that relatively slide on each other, wherein:

• a fluid circulation groove including an inlet section where a fluid comes in from a high pressure fluid side, an outlet section where the fluid goes out to the high pressure fluid side, and a communication section that provides communication between the inlet section and the outlet section is provided in the sealing face on one side;
• the fluid circulation groove is isolated from a low pressure fluid side by a land section;
• a positive pressure generation mechanism having a position pressure generation groove shallower than the fluid circulation groove is provided in a part surrounded by the fluid circulation groove and the high pressure fluid side;
• the positive pressure generation groove communicates with the inlet section and is isolated from the outlet section and the high pressure fluid side by the land section;
• the positive pressure generation groove is a shallow groove within a range of depth from 0.05 μm to 5 μm formed by irradiation of an ultrashort pulse laser;
• and
• a bulge due to debris at an edge of a processing part is less than 0.01 μm.