Method and system for characterization of nano- and micromechanical structures

A method for characterization of nano- and micromechanical structures, comprising at least one mechanical structure selected from a nanomechanical structure and a micromechanical structure, the mechanical structure being formed by at least one layer, where each layer is of a different material, characterized in that it comprises the following steps:

• defining a coordinate system in which the X- and Y-axes correspond to a surface plane of the mechanical structure;
• exciting the mechanical structure by means of a signal made up of at least two sinusoidal signals at different frequencies;
• automatically scanning the surface plane of the mechanical structure by means of a laser beam;
• capturing a laser beam reflected off the surface plane of the mechanical structure by means of an optical/optometric detector previously placed in the path of the reflected beam obtaining slope vectors in an X plane and in a Y plane of the surface plane of the mechanical structure;
• performing a fast Fourier transform on the slope vectors in the X and Y planes;
• defining a mask based on the intensity of the reflected laser beam;
• applying the mask to dynamic components of the slope vectors in the X and Y planes, to obtain a normal data vector normal to the static surface plane and multifrequency;
• and
• reconstructing a topography and a shape of at least two modes of vibration by iterative two-dimensional integration of the normal data vector.