Substrate processing apparatus and non-transitory computer-readable recording medium

A substrate processing apparatus comprising:

• a manipulation unit configured to:
• control an execution of a process recipe defining an order of processing a substrate;
• and receive a resume command instructing to resume a stopped process recipe while managing a process status of the substrate and a status of the substrate processing apparatus;
• and
• a controller configured to control an operation of a process chamber providing an added value to the substrate by processing a surface thereof;
• wherein the manipulation unit is configured to:
• change the status of the substrate processing apparatus to running state and the process status of the substrate to a processing state such that the controller executes the process recipe;
• change the status of the substrate processing apparatus to abnormal termination state when an execution of the process recipe by the controller is stopped due to an error occurring during the execution of the process recipe;
• determine whether the execution of the process recipe be resumed upon receiving the resume command after the error is canceled;
• change the process status of the substrate from pause state to aborted state when the execution of the process recipe is determined to be not resumable such that the controller ends the execution of the process recipe;
• change the process status of the unprocessed substrate from pause state to processing state when the execution of the process recipe is determined to be not resumable such that the execution of the process recipe is resumed by the controller;
• and change the process status of the substrate from the pause state to an aborted state and terminate the execution of the process recipe upon receiving a command instructing to abort the stopped process recipe, and
• the manipulation unit is further configured to, when determining whether the execution of the process recipe be resumed:
• check whether the process status of the substrate processing apparatus is ready state or the running state;
• check whether the process status of the substrate processing apparatus is running state;
• check whether a maintenance status of the substrate processing apparatus is maintenance mode;
• check whether a communication line is available;
• and check whether the substrate is unloaded from the substrate processing apparatus.