Resist placing method and resist placing program
AssigneeToshiba Memory Corporation
InventorSatoshi Tanaka
Life of this patent
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Abstract
According to one embodiment, a resist placing method sets first and second grating vectors of a drop grating on which to place a resist drop. At this time, the first and second grating vectors are set based on information about a grid, which is a minimum grating unit for which the resist drop can be dropped, such that the thickness of a resist film after imprinting is within a predetermined range. In this case, the first and second grating vectors are set to be in directions different from both first and second minimum grating vectors of the grid. Then, the resist drop is placed in the drop grating.
Claims8
A resist placing method comprising:
- setting, based on information about a grid, first and second grating vectors of a drop grating so that the first and second grating vectors have directions different from both first and second minimum grating vectors of the grid, the grid being a minimum grating unit for which a resist drop is dropped onto a substrate, the drop grating being a grating onto which the resist drop is placed;
- placing the drop grating in accordance with a predetermined rule;
- and
- placing a plurality of resist drops using the drop grating formed by the set first and second grating vectors,
- wherein the first grating vector is the same in component in a first direction as, and different in component in a second direction perpendicular to the first direction from, the first minimum grating vector,
- wherein the second grating vector is the same in component in the second direction as, and different in component in the first direction from, the second minimum grating vector, and
- wherein a first grating length corresponding to a smaller angle from among a first angle made by the first grating vector and the first minimum grating vector and a second angle made by the second grating vector and the second minimum grating vector, is longer than a second grating length corresponding to the larger angle.
A nontransitory computer readable medium which stores a resist placement program to have a computer calculate placement positions of resist to be used in imprinting, the resist placement program having the computer perform:
- setting, based on information about a grid, first and second grating vectors of a drop grating so that the first and second grating vectors have directions different from both first and second minimum grating vectors of the grid, the grid being a minimum grating unit for which a resist drop is dropped onto a substrate, the drop grating being a grating onto which the resist drop is placed;
- placing the drop grating in accordance with a predetermined rule;
- and
- placing a plurality of resist drops using the drop grating formed by the set first and second grating vectors,
- wherein the first grating vector is the same in component in a first direction as, and different in component in a second direction perpendicular to the first direction from, the first minimum grating vector,
- wherein the second grating vector is the same in component in the second direction as, and different in component in the first direction from, the second minimum prating vector, and
- wherein a first grating length corresponding to a smaller angle from among a first angle made by the first grating vector and the first minimum grating vector and a second angle made by the second grating vector and the second minimum grating vector, is longer than a second grating length corresponding to the larger angle.
Dependencies are inferred from the claim text.