Filtering lead from photoresist stripping solution
AssigneeInternational Business Machines Corporation
InventorsCharles L. Arvin, Harry D. Cox, Arthur G. Merryman, Jennifer D. Schuler
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AssigneeInternational Business Machines Corporation
InventorsCharles L. Arvin, Harry D. Cox, Arthur G. Merryman, Jennifer D. Schuler
Estimating the term…
A photoresist stripping tool includes a reservoir configured to contain photoresist stripping solution and a Pb filter comprising a filter element with Tin (Sn) exterior surfaces. A semiconductor wafer fabrication system includes a semiconductor wafer attached to the photoresist stripping tool that strips photoresist from the semiconductor wafer. A photoresist stripping processes includes stripping photoresist from a leaded semiconductor wafer with photoresist stripping solution within the photoresist stripping tool, filtering Lead Pb from the photoresist stripping solution with the Pb filter, and stripping photoresist from a lead-free semiconductor wafer with the filtered photoresist stripping solution.
A photoresist stripping tool comprising:
A semiconductor wafer fabrication system comprising:
Dependencies are inferred from the claim text.