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US 9,793,123 B2Granted
Method for fabricating a nano structure
AssigneeSK Innovation Co., Ltd.
InventorJun-Hyung Kim
Life of this patent
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Abstract
Provided are a nano structure, a fabrication method thereof, and an application device thereof. The method for fabricating a nano structure includes: forming a substrate; forming a plurality of linkers over the substrate; forming a plurality of metal ions over the linkers; and forming one or more metallic nanoparticles over the linkers.
Claims21
A method for fabricating a nano structure, comprising:
- forming a substrate;
- forming linkers over the substrate;
- forming metal ions over the linkers;
- and
- aggregating the metal ions, each of which is bonded to the substrate through each of the linkers, to each other to form one or more metallic nanoparticles,
- wherein each of the metallic nanoparticles is formed by aggregating between one metal ion bonded to one linker and another metal ion bonded to another linker.
3 more elements
Dependencies are inferred from the claim text.