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US 9,791,783 B2Granted
Exposure apparatus and exposure method using the same
AssigneeSamsung Display Co., Ltd.
InventorsJae-Weon Hur, Hong-Yeon Lee, Baek-Kyun Jeon
Life of this patent
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Abstract
An exposure apparatus including a substrate transporting unit configured to transport a substrate in a first direction, and including a first measuring part; and an exposure part disposed over the substrate transporting unit configured to irradiate the substrate with ultraviolet rays. The first measuring part is configured to measure an intensity of the ultraviolet rays before the substrate is irradiated.
Claims20
An exposure apparatus, comprising:
- a substrate transporting assembly configured to transport a substrate in a first direction, the substrate transporting assembly comprising a support configured to support the substrate during transport, the support comprising a first measuring part extending therefrom;
- and
- an exposure part disposed over the substrate transporting assembly, the exposure part being configured to irradiate the substrate with ultraviolet rays to photo-align components of a photo-alignment layer disposed on a plane of the substrate,
- wherein the first measuring part is configured to measure a polarization direction of the ultraviolet rays before the substrate is irradiated,
- wherein the exposure part is configured to tilt with respect to the plane based on the polarization direction of the ultraviolet rays to photo-align the components in a direction intersecting the plane, and
- wherein the first measuring part extends along a majority of an edge of the support in a second direction substantially perpendicular to the first direction.
3 more elements
An exposure apparatus, comprising:
- a substrate transporting assembly to transport a substrate in a first direction, the substrate transporting assembly comprising:
- a first support to support the substrate during transport;
- and
- a second support coupled to the first support;
- a source of ultraviolet illumination to irradiate the substrate with ultraviolet rays, the source overlapping the substrate transporting assembly,
- wherein the second support comprises:
- a rail extending in a second direction crossing the first direction;
- and
- at least one sensor slideably coupled to the rail, the at least one sensor being configured to slide on the rail relative to the substrate to detect one or more aspects of the ultraviolet rays with respect to different portions of the substrate during transport of the substrate in the first direction.
6 more elements
An exposure method to at least partially form aspects of consumer products, the exposure method comprising:
- exposing, via an exposure apparatus, a first substrate to ultraviolet rays by moving the first substrate past a source of ultraviolet rays at a first transport speed, the first substrate being associated with a first consumer product of the consumer products;
- measuring, while a second substrate moves towards the source and the first substrate moves away from the source, a first intensity of the ultraviolet rays, the second substrate being associated with a second consumer product of the consumer products, wherein the second consumer product is different from the first consumer product;
- determining a second transport speed based on the first intensity and a set total amount of exposure;
- and
- exposing, via the exposure apparatus, the second substrate different from the first substrate to the ultraviolet rays by moving the second substrate past the source at the second transport speed.
2 more elements
Dependencies are inferred from the claim text.