Conductive polymer composition, coated article, patterning process and substrate
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsTakayuki Nagasawa, Jun Hatakeyama
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Abstract
The present invention provides a conductive polymer composition which contains (A) a polyaniline-based conductive polymer having a repeating unit represented by the general formula (1), (B) a polyanion, and (C) a betaine compound, wherein RA1 to RA4 independently represent a hydrogen atom, a halogen atom, or a linear, branched, or cyclic monovalent hydrocarbon group having 1 to 20 carbon atoms and optionally containing a heteroatom; and RA1 and RA2, or RA3 and RA4 may be bonded to each other to form a ring. There can be provided a conductive polymer composition that has excellent antistatic performance and applicability, does not adversely affect a resist, and can be suitably used in lithography using electron beam or the like.
Claims12
A conductive polymer composition comprising:
- (A) a polyaniline-based conductive polymer having a repeating unit represented by the general formula (1);
- (B) a polyanion;
- (C) a betaine compound;
- and (D) water or solvent;
- wherein RA1 to RA4 independently represent a hydrogen atom, a halogen atom, or a linear, branched, or cyclic monovalent hydrocarbon group having 1 to 20 carbon atoms and optionally containing a heteroatom;
- and RA1 and RA2, or RA3 and RA4 may be bonded to each other to form a ring,
- wherein the component (C) is selected from the betaine compounds shown below,
- or betaine compounds represented by the general formula (3),
- wherein RB1 to RB3 independently represent a hydrogen atom, or a linear, branched, or cyclic monovalent hydrocarbon group having 1 to 20 carbon atoms and optionally substituted by a heteroatom or optionally interposed by a heteroatom;
- RB1 and RB2, or RB1, RB2, and RB3 may be bonded to each other to form a ring with A+ in the formula;
- A+ is a heteroatom and represents a monovalent cation;
- k represents an integer of 2 to 8;
- L represents a carbon atom or a heteroatom, and may contain the both of them;
- RB4 and RB5 independently represent a hydrogen atom, or a linear, branched, or cyclic monovalent hydrocarbon group having 1 to 20 carbon atoms and optionally interposed by a heteroatom;
- and RB4 and RB5 may be bonded to each other to form a ring.
Dependencies are inferred from the claim text.