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US 9,755,612 B2Granted
Method for creating a resonator
AssigneeThe Swatch Group Research and Development Ltd
InventorsThierry Hessler, Silvio Dalla Piazza
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Abstract
A method for manufacturing a resonator in a substrate, including: a) modifying a structure of at least one region of the substrate to make the at least one region more selective; b) etching the at least one region to selectively manufacture the resonator.
Claims21
A method for manufacturing a resonator in a substrate, the method comprising:
- modifying a structure of at least one region of the substrate by multiphoton absorption of a laser in order to make said at least one region more selective;
- and
- etching said at least one region in order to selectively manufacture said resonator,
- wherein a pulse duration of the laser ranges from a femtosecond to a picosecond.
1 more element
Dependencies are inferred from the claim text.