High density solid state light source array

An apparatus for providing pulsed or continuous energy in a semiconductor process chamber, the apparatus comprising:

• a process chamber body of the semiconductor process chamber;
• one or more solid state source arrays providing pulsed or continuous energy to the semiconductor process chamber, wherein each of the one or more solid state source arrays includes:
• a substrate having at least one plurality of solid state light sources disposed on a first surface of the substrate,
• wherein each of solid state light sources within the at least one plurality of solid state light sources is connected in series and in a recursive pattern on the first surface of the substrate,
• wherein a packing efficiency is greater than 65% of a total surface area of the first surface of the substrate, and wherein a distance between each row of solid state light sources of the at least one plurality of solid state light sources is selected to minimize a current leakage between each row of solid state light sources of the at least one plurality of solid state light sources;
• and
• a heat sink coupled to a second surface of the substrate configured to remove heat from the substrate;
• and
• a power source coupled to one or more solid state source arrays to electrically power the at least one plurality of solid state light sources.