Substrate table system, lithographic apparatus and substrate table swapping method

A substrate table system comprising a substrate table and a dual directional motor for moving the substrate table in a plane of movement, the horizontal plane of movement being defined by a first direction and a second direction perpendicular to the first direction, the dual directional motor comprising:

• a first pusher structure extending in the first direction, the substrate table being movable with respect to the first pusher structure, the first pusher structure and the substrate table being arranged to cooperate so as to form a first motor arranged to exert a force between the first pusher structure and the substrate table in the first direction;
• and
• a second pusher structure extending in the first direction, the substrate table being movable with respect to the second pusher structure along the first and second directions, the second pusher structure and the substrate table being arranged to cooperate so as to form a second motor arranged to exert a force between the second pusher structure and the substrate table in the second direction,
• wherein the first and second pusher structures are movably connected to a frame,
• wherein the first pusher structure is movable with respect to the frame along the second direction, and
• wherein the frame comprises two parallel guiding structures extending along the second direction, the first pusher structure extending along the first direction from one of the guiding structures to a location that is substantially at a center between the guiding structures.