Mask plate
AssigneesBoe Technology Group Co., Ltd., Chengdu Boe Optoelectronics Technology Co., Ltd.
InventorBing Lu
Life of this patent
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Abstract
The present disclosure provides a mask plate, belongs to the field of display technology, and can maintain a uniform exposing interval, so that the exposure pattern has a uniform deformation amount and pattern size. A mask plate comprises opaque regions and transparent regions, and spacers of the same height are arranged in the opaque regions. Another mask plate comprises active regions and dummy regions, and spacers of the same height are arranged in the dummy regions. The present disclosure can be applied in a process for fabricating a color film substrate.
Claims11
A mask plate, comprising opaque regions and transparent regions, wherein spacers of the same height are arranged in said opaque regions, and an edge of said spacers is spaced from an edge of said opaque regions by 3-10 μm.
A mask plate, comprising active regions and dummy regions, wherein spacers of the same height are arranged in said dummy regions, and an edge of said spacers is spaced from an edge of said dummy regions by 3-10 μm.
Dependencies are inferred from the claim text.