High damage threshold frequency conversion system
AssigneeKLA-Tencor Corporation
InventorJ. Joseph Armstrong
Life of this patent
Estimating the term…
Loading patent…
AssigneeKLA-Tencor Corporation
InventorJ. Joseph Armstrong
Estimating the term…
The present invention includes a fundamental laser light source configured to generate fundamental wavelength laser light, a first nonlinear optical crystal configured to generate first alternate wavelength light, a second nonlinear optical crystal configured to generate second alternate wavelength light, a set of Brewster angle wavefront processing optics configured to condition the first and second alternate wavelengths of light, and a harmonic separator configured to receive the first alternate wavelength light and the second alternate wavelength light from the set of Brewster angle wavefront processing optics, the harmonic separator configured to at least partially separate the first alternate wavelength light from the second alternate wavelength light.
An apparatus for laser frequency conversion having a high damage threshold, comprising:
An apparatus for laser frequency conversion having a high damage threshold, comprising:
A method for laser frequency conversion with high damage threshold, comprising:
Dependencies are inferred from the claim text.