Actuator and movable mirror

A movable mirror comprising:

• at least one actuator and a reflecting member connected to the at least one actuator, the at least one actuator comprising:
• a movable portion having a first surface,
• a plurality of movable comb electrodes that are supported by a second surface of the movable portion, and extends in a direction parallel to the first surface, wherein the second surface is different from the first surface,
• a supporting portion,
• a plurality of stationary comb electrodes that are supported by the supporting portion, extends in the direction parallel to the first surface, and are disposed alternately with the plurality of movable comb electrodes,
• a spring that connects the movable portion and the supporting portion, and
• a voltage controller that applies a voltage to the plurality of movable comb electrodes and the plurality of stationary comb electrodes to displace the plurality of movable comb electrodes and the movable portion in a direction intersecting with the first surface,
• wherein the plurality of movable comb electrodes and the plurality of stationary comb electrodes are disposed to have portions that do not overlap each other in a direction intersecting with the first surface when the voltage controller does not apply a voltage,
• wherein the plurality of movable comb electrodes project in a first orientation of the direction intersecting with the first surface toward a portion in which the plurality of movable comb electrodes and the plurality of stationary comb electrodes overlap each other, and
• wherein the plurality of stationary comb electrodes project in an opposite orientation of the first orientation of the direction intersecting with the first surface toward the portion in which the plurality of movable comb electrodes and the plurality of stationary comb electrodes overlap each other.

An actuator comprising:

• a movable portion having a first surface;
• a plurality of movable comb electrodes that are supported by a second surface of the movable portion, and extends in a direction parallel to the first surface, wherein the second surface is different from the first surface;
• a supporting portion;
• a plurality of stationary comb electrodes that are supported by the supporting portion, extends in the direction parallel to the first surface, and are disposed alternately with the plurality of movable comb electrodes;
• a spring that connects the movable portion and the supporting portion;
• and
• a voltage controller that applies a voltage to the plurality of movable comb electrodes and the plurality of stationary comb electrodes to displace the plurality of movable comb electrodes and the movable portion in a direction intersecting with the first surface,
• wherein the second surface of the movable portion that supports the plurality of movable comb electrodes and a surface of the supporting portion that supports the plurality of stationary comb electrodes are parallel to the direction intersecting with the first surface and face each other,
• wherein at least one of the plurality of movable comb electrodes includes a plurality of electrodes that are electrically isolated in a direction intersecting with the first surface,
• wherein at least one of the plurality of stationary comb electrodes include a plurality of electrodes that are electrically isolated in a direction intersecting with the first surface, and
• wherein the voltage controller applies different voltages to the plurality of electrodes included in the at least one of the plurality of movable comb electrodes respectively and applies different voltages to the plurality of electrodes included in the at least one of the plurality of stationary comb electrodes respectively.

An actuator comprising:

• a movable portion having a first surface;
• a plurality of movable comb electrodes that are supported by a second surface of the movable portion, and extends in a direction parallel to the first surface, wherein the second surface is different from the first surface;
• a supporting portion;
• a plurality of stationary comb electrodes that are supported by the supporting portion, extends in the direction parallel to the first surface, and are disposed alternately with the plurality of movable comb electrodes;
• a spring that connects the movable portion and the supporting portion;
• and
• a voltage controller that applies a voltage to the plurality of movable comb electrodes and the plurality of stationary comb electrodes to displace the plurality of movable comb electrodes and the movable portion in a direction intersecting with the first surface,
• wherein the second surface of the movable portion that supports the plurality of movable comb electrodes and a surface of the supporting portion that supports the plurality of stationary comb electrodes are parallel to the direction intersecting with the first surface and face each other,
• wherein the actuator further comprises a suppressor that suppresses the plurality of movable comb electrodes and the movable portion from being displaced in a direction other than the direction intersecting with the first surface, and
• wherein the suppressor suppresses the displacement according to feedback control that is based on electrostatic capacitance values of the plurality of movable comb electrodes and the plurality of stationary comb electrodes.