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US 9,753,101 B2Granted
XMR angle sensors
AssigneeInfineon Technologies AG
InventorJuergen Zimmer
Life of this patent
Estimating the term…
Abstract
Embodiments relate to xMR sensors, sensor elements and structures, and methods. In an embodiment, a sensor element comprises a non-elongated xMR structure; and a plurality of contact regions formed on the xMR structure spaced apart from one another such that a non-homogeneous current direction and current density distribution are induced in the xMR structure when a voltage is applied between the plurality of contact regions.
Claims12
A sensor element comprising:
- a plurality of non-elongated xMR structures being serially coupled;
- and at least a
- selected one of the plurality of non-elongated xMR structures comprising:
- a first contract region and a second contact region formed on the xMR structure and spaced apart from one another such that a non-homogeneous current direction and current density distribution are induced in the selected xMR structure when a voltage is applied between the first and second contact regions.
1 more element
A sensor element comprising:
- a non-elongated xMR element;
- a first contact region formed on the xMR element and coupled to a first terminal;
- a second contact region formed on the xMR element and coupled to a second terminal and spaced apart from the first contact region along a first contact axis;
- and
- a third contact region formed on the xMR element and coupled to the second terminal and spaced apart from the first contact region along a second contact axis rotated ninety degrees with respect to the first contact axis such that two electrically parallel current paths, which are physically orthogonal to one another, are exhibited by the xMR element.
2 more elements
A method comprising:
- forming an xMR sensor element;
- forming:
- a first contact region on the xMR element and coupled to a first terminal;
- a second contact region on the xMR element and coupled to a second terminal and spaced apart from the first contact region along a first contact axis;
- and
- a third contact region on the xMR element and coupled to the second terminal and spaced apart from the first contact region along a second contact axis rotated ninety degrees with respect to the first contact axis such that two electrically parallel current paths, which are physically orthogonal to one another, are exhibited by the xMR element;
- and
- causing a current to flow in the xMR sensor element with a locally non-homogenous current direction and current density distribution.
5 more elements
Dependencies are inferred from the claim text.