US 9,753,056 B2Granted

Acceleration sensor

AssigneeMurata Manufacturing Co., Ltd.

InventorsTakuo Hada, Katsumi Fujimoto, Hideya Horiuchi, Toshimaro Yoneda

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Abstract

A weight member includes two sides opposite to each other in an X-axis direction when looked at in a plan view. A vibrating beam includes one end portion connected at one location to a fixation member and the other end portion connected at one location to one of the two sides of the weight member in the X-axis direction when looked at in a plan view. The vibrating beam supports the weight member to be displaceable in the X-axis direction. A holding beam includes one end portion connected at one location to the fixation member and the other end portion connected at one location to the other of the two sides of the weight member opposing to each other in the X-axis direction when looked at in a plan view. The holding beam supports the weight member to be displaceable in the X-axis direction. A driver is disposed on the vibrating beam and vibrates the vibrating beam. A detector is disposed on the vibrating beam and configured to output a detection signal changes according to deformation of the vibrating beam.

Claims15

Dependent claims

An acceleration sensor comprising:

a fixation member;
a weight member including two sides opposite to each other in a first direction when looked at in a plan view;
a vibrating beam including a first end portion connected at one location to the fixation member and a second end portion connected at one location to one of the two sides of the weight member opposite to each other in the first direction when looked at in a plan view, the vibrating beam supporting the weight member to be displaceable in the first direction;
a holding beam including a first end portion connected at one location to the fixation member and a second end portion connected at one location to the other of the two sides of the weight member opposing to each other in the first direction when looked at in a plan view, the holding beam supporting the weight member to be displaceable in the first direction;
a driver disposed on the vibrating beam and vibrating the vibrating beam;
and
a detector disposed on the vibrating beam and configured to output a detection signal that changes according to deformation of the vibrating beam;
wherein
at the one of the two sides of the weight member opposite to each other in the first direction when looked at in a plan view, the weight member is connected to the fixation member by only the vibrating beam and the weight member is supported at only one location;
at the other of the two sides of the weight member opposite to each other in the first direction when looked at in a plan view, the weight member is connected to the fixation member by only the holding beam and the weight member is supported at only one location;
and
the weight member is supported at a total of only two locations.

9 more elements

Dependencies are inferred from the claim text.

Facts

Application: 14/501,109Filed 30 Sep 2014 · continuation
Priority: JP 2012-10284427 Apr 2012
Published: US 2015/0013457 A115 Jan 2015
Granted: 5 Sep 2017
Term ends: Not estimatedThe source records don’t support an estimate.

Classification5 codes

G01P 15/097
With conversion into electric or magnetic values: by vibratory elements
G01P 15/09
With conversion into electric or magnetic values: by piezoelectric pick-up
G01P 15/10
By vibratory elements: by vibratory strings
G01P 2015/0814
For one single degree of freedom of movement of the mass: for translational movement of the mass, e.g. shuttle type

Family

PCT/JP2013/061149Parent of this continuation · filed 15 Apr 2013
US 2015/0013457 A1Pre-grant publication · published 15 Jan 2015
US 9,753,056 B2This patent

From the US filing history. Foreign family members aren’t listed.

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