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US 9,753,013 B2Granted
Charged particle detector
AssigneeBrechtel Manufacturing, Inc.
InventorsFredrick J Brechtel, David A. Horsley, Gerardo Jaramillo
Life of this patent
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Abstract
A system and method comprising a charger for ionizing aerosols; a spectrometer coupled to the charger and operable to select for a predetermined particle size; a porous charge collector coupled to the spectrometer, and a MEMS electrometer. In some embodiments the charge collector may be a metal frit electrically coupled to the electrometer. The electrometer may include a comb drive actuator coupled to a moving shuttle supported on flexures.
Claims12
A system comprising:
- a charger for ionizing aerosols;
- a spectrometer coupled to the charger and operable to select for a predetermined particle size;
- a charge collector coupled to the spectrometer, and
- a microelectromechanical (MEMS) electrometer said electrometer coupled to the charge collector.
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A method including:
- receiving an airflow, said airflow including an aerosol;
- charging the aerosol within the airflow;
- size-selecting a portion of the aerosol within the airflow, and
- applying the size-selected aerosol portion to a MEMS electrometer.
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Dependencies are inferred from the claim text.