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US 9,753,006 B2Granted
High density nano-array for sensing
AssigneeInternational Business Machines Corporation
InventorsQing Cao, Kangguo Cheng, Zhengwen Li, Fei Liu, Zhen Zhang
Life of this patent
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Abstract
A sensor includes a semiconductor substrate having first pointed nodes extending into a channel from a first side of the channel. Second pointed nodes extend into the channel from a second side of the channel, which is opposite the first side. The second pointed nodes being self-aligned to the first pointed nodes on the opposite side of the channel. The first pointed nodes and the second pointed nodes are connected to a circuit to detect particles in the channel.
Claims13
A method for forming a sensor, comprising:
- forming a buried doping layer in a semiconductor substrate;
- forming fins in the substrate down to the buried doping layer;
- depositing a permeable filler material from the buried doping layer to a height along the fins;
- enclosing portions of the fin above the height along the fins in a non-permeable material;
- decomposing the fins within the filler material by permeating a reactant through the filler material to form first pointed nodes in the portions of the fins and second pointed nodes in the buried doping layer, the first and second pointed nodes being self-aligned to each other;
- and
- removing the filler material to form a channel for receiving materials to be sensed.
4 more elements
A method for forming a sensor, comprising:
- forming a buried doping layer in a semiconductor substrate;
- etching fins in the substrate down to the buried doping layer;
- depositing an oxygen permeable filler material from the buried doping layer to a height along the fins;
- enclosing portions of the fin above the height along the fins in a non-permeable nitride material;
- oxidizing the fins within the filler material to form self-aligned bird's peak points extending into the filler material from opposite sides;
- and
- removing the filler material to form a channel for receiving materials to be sensed.
4 more elements
Dependencies are inferred from the claim text.