Charged-particle-beam analysis device and analysis method

A charged particle beam analyzer comprising a charged particle beam optical system, a sample stage for mounting a sample thereon, an X-ray spectrometer, a control unit, and an operation unit, and controlling the charged particle beam optical system by means of the control unit to irradiate the sample with a charged particle beam, detecting an X-ray generated from the sample by means of the X-ray spectrometer, and performing map evaluation for the sample with use of detected information, wherein

• the X-ray spectrometer is a wavelength dispersive X-ray spectrometer (WDX spectrometer), and
• the operation unit includes:
• a storage unit having stored therein a correlation database between a plurality of average atomic numbers and WDX background intensity values obtained with use of a plurality of standard samples;
• a WDX background processing means including an average atomic number calculation means for calculating an average atomic number map with use of X-ray energy corresponding to a specific light element on a surface of the sample and a background elimination means for eliminating a WDX background intensity map derived from the average atomic number map for the surface of the sample calculated by the average atomic number calculation means and the correlation database stored in the storage unit from a WDX spectrum map for the sample obtained with use of the X-ray spectrometer;
• and
• an image display unit for displaying the WDX background intensity map derived from the correlation database stored in the storage unit.