Apparatus with a spectral reflectometer for processing substrates
AssigneeLam Research Corporation
InventorsSeonkyung Lee, Dmitry Opaits
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Abstract
A spectral reflectometer system for measuring a substrate is provided. A light source is provided. At least one optical detector is provided. An optical cable comprises a plurality of optical fibers, wherein the plurality of optical fibers comprises a first plurality of optical fibers, which are transmission optical fibers which extend from the light source to an optical path, and a second plurality of optical fibers, which are reflection optical fibers which extend from the optical path to the at least one optical detector. A microlens array is in the optical path.
Claims17
A spectral reflectometer system for measuring a substrate in a processing chamber, comprising
- a light source;
- at least one optical detector;
- an optical cable, comprising a plurality of optical fibers, wherein the plurality of optical fibers comprises a first plurality of optical fibers, which are transmission optical fibers which extend from the light source to a first portion of a housing supporting the optical cable, and a second plurality of optical fibers, which are reflection optical fibers which extend from the first portion of the housing to the at least one optical detector;
- a second portion of the housing including an optical path for light to traverse through the second portion of the housing;
- and
- a microlens array in the optical path of the second portion of the housing;
- wherein the housing transmits light from the light source to an illuminated portion of the substrate and collects reflected light from the illuminated portion of the substrate.
An apparatus for processing a substrate, comprising:
- a processing chamber;
- a substrate support for supporting the substrate within the processing chamber;
- and
- a spectral reflectometer system, comprising:
- a light source;
- at least one optical detector;
- an optical cable, comprising a plurality of optical fibers, wherein the plurality of optical fibers comprises a first plurality of optical fibers, which are transmission optical fibers which extend from the light source to an optical path, and a second plurality of optical fibers, which are reflection optical fibers which extend from the optical path to the at least one optical detector;
- a microlens array in the optical path, wherein the microlens array comprises a plurality of microlens;
- and
- an optical assembly supported across the optical path, wherein the optical path is positioned to provide light from the light source to an illuminated portion of the substrate and collect reflected light from the illuminated portion of the substrate, wherein light from the light source and reflected light pass through the microlens array, wherein each microlens of the plurality of microlens has a focal plane, and wherein the illuminated portion of the substrate does not lie on any focal plane of the plurality of microlens.
Dependencies are inferred from the claim text.