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US 9,752,978 B2Granted
Micromachined flow cell with freestanding fluidic tube
AssigneeAgilent Technologies, Inc.
InventorsKarsten Kraiczek, John Mannion, Kevin P. Killeen
Life of this patent
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Abstract
A micromachined flow cell includes a substrate and a freestanding tube, delimiting a fluidic conduit therein and being integrally formed from material of the substrate.
Claims33
A flow cell, comprising:
- a substrate;
- and
- a freestanding tube delimiting a fluidic conduit therein and being integrally formed from material of the substrate, and surrounded by a gas atmosphere,
- wherein the freestanding tube comprises a section comprising a first end and a second end, and the section is configured for receiving electromagnetic radiation at the first end, and for emitting at the second end electromagnetic radiation having propagated through the fluidic conduit, and wherein the electromagnetic radiation coupled into the fluidic conduit undergoes total internal reflection at a boundary between an exterior surface of the freestanding tube and the surrounding gas atmosphere.
1 more element
A method of manufacturing a flow cell by micromachining, the method comprising:
- providing a substrate;
- integrally forming, from material of the substrate, a freestanding tube such that the freestanding tube is surrounded by a gas atmosphere;
- and
- delimiting a fluidic conduit in the freestanding tube,
- wherein the freestanding tube comprises a section comprising a first end and a second end, and the section is configured for receiving electromagnetic radiation at the first end, and for emitting at the second end electromagnetic radiation having propagated through the fluidic conduit, and wherein the electromagnetic radiation coupled into the fluidic conduit undergoes total internal reflection at a boundary between an exterior surface of the freestanding tube and the surrounding gas atmosphere.
2 more elements
Dependencies are inferred from the claim text.