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US 9,752,944 B2Granted
Microelectromechanical sensing structure for a pressure sensor including a deformable test structure
AssigneeSTMicroelectronics S.r.l.
InventorAlberto Pagani
Life of this patent
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Abstract
A microelectromechanical sensing structure having a membrane region including a membrane that undergoes deformation as a function of a pressure and a first actuator that is controlled in a first operating mode and a second operating mode, the first actuator being such that, when it operates in the second operating mode, it contacts the membrane region and deforms the membrane in a way different from when it operates in the first operating mode.
Claims4
A system, comprising:
- a first die;
- a sensor formed in the first die, the sensor including:
- a first cavity;
- a membrane over the first cavity;
- a first actuator over the membrane, the first actuator being configured to operate in a first operating mode and in a second operating mode;
- and
- a cap over the first actuator and over the membrane;
- a second cavity formed by the cap, the first actuator being in the second cavity.
5 more elements
Dependencies are inferred from the claim text.